Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface
نویسندگان
چکیده
We proposed the method of using a multi-ball-cantilever AFM for measuring the surface profile of soft thin film. At first, we performed the computer simulation to verify the feasibility of this method. Then, we developed the multi-ball-cantilever AFM system using a multi-ball-cantilever that had 8 cantilevers in 2 mm and each cantilever had the ball stylus with 10.9 μm of diameter. The fundamental experiments were carried out using this system and we confirmed the feasibility for measuring the surface of soft thin film with high speed and high accuracy.
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